For citations:

Cherkesova N.V., Mustafaev G.A., Mustafaev A.G. PROPERTIES OF TITANIUM SILICIDE FILMS OBTAINED BY CHEMICAL GAS-PHASE PLASMA-ACTIVATED DEPOSITION. Proceedings of the Kabardino-Balkarian State University. 2023;13(4):72-75. (In Russ.) https://doi.org/10.31143/2221-7789-2023-4-72-75. EDN: JMLIHB