For citations:

Cherkesova N.V., Mustafayev H.A., Mustafaev A.G. RESEARCH OF THE EFFECT OF ANNEALING TEMPERATURE OF REFRACTORY METAL SILICIDE FILMS ON THE ATOMIC RATIO Si/METAL. Proceedings of the Kabardino-Balkarian State University. 2022;12(4):39-43. (In Russ.)