For citations:

Cherkesova N.V., Mustafayev G.A., Mustafayev A.G. PROPERTIES OF SILICON DIOXIDE FILMS FORMED USING SILANE AND CARBON DIOXIDE. Proceedings of the Kabardino-Balkarian State University. 2025;15(4):14-17. (In Russ.) https://doi.org/10.31143/2221-7789-2025-4-14-17. EDN: VEKWRT