THE EFFECT OF PHOSPHORUS CONCENTRATION AND GAS MEDIUM VAPOR PRESSURE ON THE MELTING DEGREE OF PHOSPHOROSILICATE GLASS
https://doi.org/10.31143/2221-7789-2024-1-26-29
EDN: EDPTQH
Abstract
The effect of phosphorus content, temperature, and vapor pressure on the melting temperature of phosphorosilicate glass was investigated. It is demonstrated that the melting rate increases with increasing temperature and phosphorus concentration, and that the length and speed of melting are affected by the gas medium in which the melting occurs. The reflow efficiency declines in the following order: pyrogenic steam, wet O2, dry O2, dry N2. It is demonstrated that one method for addressing the problem of lowering the temperature of technological processes is to conduct the melting process at elevated gas medium pressure.
About the Authors
N. V. CherkesovaRussian Federation
G. A. Mustafaev
Russian Federation
A. G. Mustafaev
Russian Federation
References
1. Mustafaev G.A., Cherkesova N.V. Three-Dimensional Integrated Circuits: Textbook. Nalchik: KBGU, 2016. 89 p.
2. Krasnikov G.Ya. Design and Technological Features of Submicron MOS Transistors. M.: Tekhnosfera, 2011. 799 p.
3. Zyatkov I.I., Krivosheeva A.N. Basic Processes of Planar Technology: Electronic Textbook. manual. SPb.: «ETI», 2018. 1 el.-opt. disk (CD-ROM).
4. Gromov D.V., Krasnyuk A.A. Materials Science for Micro- and Nano-Electronics: Textbook. M.: MIFI, 2008. 156 p.
5. Pierce K. VLSI Technology: in 2 books. / translated from English by V.M. Zverolovlev. Moscow: Mir, 1986. 404 p.
6. Mogheb K. VLSI Technology: in 2 books. / translated from English by V.N. Leykin. Moscow: Mir, 1986. 453 p.
7. Mustafaev G.A., Mustafaev A.G., Cherkesova. N.V. Thin Layers of Oxide Coating in Very-Large- Scale Integration // AER-Advances in Engineering Research. 2018. V. 177. Р. 377–379.
Review
For citations:
Cherkesova N.V., Mustafaev G.A., Mustafaev A.G. THE EFFECT OF PHOSPHORUS CONCENTRATION AND GAS MEDIUM VAPOR PRESSURE ON THE MELTING DEGREE OF PHOSPHOROSILICATE GLASS. Proceedings of the Kabardino-Balkarian State University. 2024;14(1):26-29. (In Russ.) https://doi.org/10.31143/2221-7789-2024-1-26-29. EDN: EDPTQH
JATS XML


