THEORY OF LASER ABLATION
Abstract
In this work, the process of destruction of a solid substance, similar to evaporation or sublimation, is studied, usually complicated by the presence of a condensed phase in the destruction products (laser ablation). The dependence of the thickness of polyimide ablated per pulse under the action of excimer ArF, KrF, XeCl and XeF lasers as a function of the irradiation dose is obtained.
It is shown that laser ablation is one of the main mechanisms of laser destruction of polymers under the action of laser radiation.
About the Authors
Boris Inalovich KunizhevRussian Federation
Zeynap Sultanovna Torshchoeva
Russian Federation
Malika Mussaevna Polonkoeva
Russian Federation
Asiyat Mukhamedovna Kugotova
Russian Federation
References
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Review
For citations:
Kunizhev B.I., Torshchoeva Z.S., Polonkoeva M.M., Kugotova A.M. THEORY OF LASER ABLATION. Proceedings of the Kabardino-Balkarian State University. 2022;12(5):14-18. (In Russ.)
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